Precise positioning stage of THK PRECISION

  • Specialized manufacturer of nano-order precision positioning stages and equipment using piezoelectric actuators and piezoelectric elements Specialized manufacturer of nano-order precision positioning stages and equipment using piezoelectric actuators and piezoelectric elements

    Ultraprecise Positioning Stage

    Ultra-precision positioning piezo stage supporting
    advanced technology with "ultra-high resolution of 1 nm" and "high-speed response of milliseconds"

    Applications

    Semiconductor and FPD related equipment / AFM / HDD inspection / Minute
    analytical instruments / Optical communication and measurement

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