Japanese piezoelectric equipment manufacturer
Examples of product application

Examples of product application

Laser/optics-related equipment,optical adjustment

Piezo Stage Precision Motor Stage

Mirror alignment of interferometer

Mirror alignment of interferometer

Transmissive optics alignment

Transmissive optics alignment

Optical fiber adjustments

Optical fiber adjustments

Mirror scanning for laser processing

Mirror scanning for laser processing

Photomask substrate alignment of exposure equipment

Photomask substrate alignment of exposure equipment

Precise tilt adjustment of mirror

Precise tilt adjustment of mirror

Precision scanning / mapping measurement

Piezo Stage Precision Motor Stage

Pixel shift of CCD

Pixel shift of CCD

Microscope and analytical instruments

Microscope and analytical instruments

AFM / SPM

Mapping measurements

Semiconductor and LCD test equipment

Nanometer scanning

Uses for objective lens focusing

For objective lens focusing

High-speed focusing of microscope

High-speed focusing of microscope

Image processing application

Image processing application

Interferometer shape measurement

Semiconductor and FPD inspection equipment

Laser processing

Confocal microscope

Ultraprecision nano-machining / high-speed cutting

A stage for ultraprecision
processing machinery

Precise feeding of diamond tool

Precise feeding of diamond tool

Right:Diamond tool precise feeding for planing
Left:Diamond tool precise feeding for lathe turning

Fast tool servo

Precision mold machining

Precise positioning of workpiece

Uses where various forms of precision positioning are required

Piezo Stage Precision Motor Stage

HDD tester

HDD tester

Fatigue tester of microdevice

Fatigue tester of microdevice

Precision parallel mating

Precision parallel mating

Frictional wear tester

Frictional wear tester

Micro force detection / measurement at μN (mg) level

Force Sensor
(Micro-force type)

Measurement of micro pressing force

Measurement of micro pressing force

Contact detection between fiber optics and function device

Contact detection between fiber optics and function device

Test measurement of spring pressure of a spring probe

Test measurement of spring pressure of a spring probe

Probing contact sensing of a semiconductor device

Probing contact sensing of a semiconductor device

Measurement of thrust force of microactuator

Pull or breaking force measurement

Puncture force of a needle point to a cell

Micro friction force and thrust force monitoring

High-sensitivity force measurement while maintaining high rigidity

Force Sensor
(High-rigidity type)

Measurement of the load of tool edge contact

Measurement of the load of tool edge contact

Measurement of the cutting resistance of lathe turning

Measurement of the cutting resistance of lathe turning

Measuring the cutting/griding force in precision machining

Detecting the contact between the cutting tool edge and the workpiece

Pressing/hardness control

Measurement of friction force

Thrust/reaction force monitoring

From inspection and measurement to manufacturing equipment

We are ready to respond to requests for precision positioning of nanometers to submicrons required for various applications.

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