Nanometer Positioning FORCE SENSING
"Ultra-precision positioning devices" and "High-sensitivity force sensors" that support nanoscale technologies from R&D to equipment integration
Ultraprecise Positioning Stage
Ultra-precision positioning piezo stage supporting
advanced technology with "ultra-high resolution of 1 nm" and "high-speed response of milliseconds"Applications
Semiconductor and FPD related equipment / AFM / HDD inspection / Minute
analytical instruments / Optical communication and measurement
Faster and more precise lens focusing by incorporating into microscopes,
inspection / measuring devices, and observation equipmentApplications
Interference applied measurement / Image processing / Semiconductor and FPD inspection
/ Laser machining / Cell observation
For Optical Mirror Alignment
Piezo-driven mirror tilting with optimal
sub-μrad resolution for laser scanning and precision alignment of optical axesApplications
Laser beam scanning / cavity adjustment / optical bio /
For High-precision Processing
Nano / micro machining stages with a robust structure for stable and precise position control
of cutting tools and heavy workpiecesApplications
Diamong Turning Tool Micro Feeding / Precision Die Machining
/ High Speed Tool Control (FTS) / Micro Cutting & Grinding Processing
force sensor that detects and measures forces as small as milligrams (mg)Applications
Puncture force measurement / Tensile and compression test / Friction force /
Viscoelasticity test / Contact detection
Linear Motor Stage
g stroke stages with coreless linear motors featuring low low speed ripple, excellent speed stability and high positioning
Liquid crystal and semiconductor related equipment / FA and automation equipment / Assembly and
conveyance machines / Testing and measuring equipment
It can control the position with ultra-high resolution of up to 1 nm and fast response speed, and is optimal for precision positioning in a small range. A wide range of variations are available.
Piezo motor stage
This is a long-stroke high-precision stage that enables nano-level positioning over the entire range of motion of several tens of millimeters and high position reproducibility with a built-in scale.
Linear motor stage
Coreless linear motor control enables smooth and stable traveling and positioning from low to high speeds even with high loading loads.
Force sensors are available in two types: a "micro force type" that responds to small forces at the mg level and a "high rigidity type" that can stably measure loads of 100 N or more.
Product Application Examples Sample
Examples of various positioning stages and force sensors.
Technical Issues Case
This is an example of selecting the optimal product for the task,
improving it and enhancing its performance.
About THK Precision About
THK Group is a company based on
elemental technologies with ultra-precision positioning at its core.
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