I want to monitor if the stage is working as intended.

Issues

I want to check the operation of the piezo stage in real time while it is in use.
Response and Suggestions

Piezo stages, which have a travel range of only several tens to several hundreds of micrometers, are not as long as stages with electromagnetic motors, so it is difficult to see their movements with the naked eye.
At this time, the motion can be viewed externally with a laser interferometer, etc., but the signal from the built-in displacement sensor used in feedback control is output as a voltage signal externally from the Sensor Monitor terminal, so the motion can be visualized by reading it with an oscilloscope.

Technical Issues List

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