Japanese piezoelectric equipment manufacturer
Piezo Stage

Stages with an opening

Piezo Stage

Logo NanoControl
Stages with an opening

Each stage in this lineup has an opening (penetration hole) in the center of the moving table. These stages are suitable for applications such as laser transmission, micro observation, in which the stage is used in combination with a microscope or an analyzer, and high-accuracy mapping measurement.

Available from a compact to large openings

The stages are available in various openings, from a compact-opening type, which is suitable for small devices, to a large-opening type, in which a large panel substrate can be aligned.

Smooth and accurate scanning

Each stage is capable of performing a highly-reliable operation according to a command signal thanks to high-accuracy feedback control.

  • SPM,AFM
  • Microscope tables
  • Spectroscopic instruments
  • Semiconductor & FPD-related inspections
  • Photolithography systems, Exposure devices
  • Mapping measurements
PK1L
X-axis stage with an opening

PK1L

Model Number Travel range
[μm]
Resolution
[nm]
Repeatability
[nm]
Resonant frequency
[Hz]
Load capacity
[N]
Size
[mm]
PK1L40-020U-N - - - 6600 5 40×70×10
PK1L60-030U 30 1 ±1 2800 10 60×70×16
PK1L45-100U 100 2 ±2 490 5 45×55×16
PK2H / PK2L
XY-axes stage with an opening

PK2H

Model Number Travel range
[μm]
Resolution
[nm]
Repeatability
[nm]
Resonant frequency
[Hz]
Load capacity
[N]
Size
[mm]
PK2H100-030U (X,Y)30 (X,Y)1
(X,Y)±1
2500 50 100×100×25
PK2H130-030U (X,Y)30 (X,Y)1 (X,Y)±1 1500 50 130×130×30
PK2H150-050U (X,Y)50 (X,Y)2 (X,Y)±2 1200 50 150×150×30

PK2L

Model Number Travel range
[μm]
Resolution
[nm]
Repeatability
[nm]
Resonant frequency
[Hz]
Load capacity
[N]
Size
[mm]
PK2L60-020U-N -
-
-
1700 10 60×60×10
PK2L100-080U (X,Y)80 (X,Y)2 (X,Y)±2 530 10 100×100×30
PK2L64-100U (X,Y)100 (X,Y)2 (X,Y)±2 300 10 64×64×30
PK2L76F-100U (X,Y)100 (X,Y)2 (X,Y)±2 240 10 76×76×32
PK2L130-100U (X,Y)100 (X,Y)2 (X,Y)±2 580 10 130×130×30
PK2L150-100U (X,Y)100 (X,Y)2 (X,Y)±2 420 10 150×150×30
PK2L150-200U (X,Y)200 (X,Y)5 (X,Y)±5 370 10 150×150×30
PK2L150-300U (X,Y)300 (X,Y)10 (X,Y)±10 240 10 150×150×30
PK2L280-200U (X,Y)200 (X,Y)5 (X,Y)±5 150 20 280×280×28
PKVH / PKVL
Z-axis stage with an opening

PKVH

Model Number Travel range
[μm]
Resolution
[nm]
Repeatability
[nm]
Resonant frequency
[Hz]
Load capacity
[N]
Size
[mm]
PKVH60-012U 12 1 ±1 2500 10 60×60×36

PKVL

Model Number Travel range
[μm]
Resolution
[nm]
Repeatability
[nm]
Resonant frequency
[Hz]
Load capacity
[N]
Size
[mm]
PKVL64F-100U 100 2 ±2 480 10 64×64×30
PKVL100-100U 100 2 ±2 480 10 100×100×30
PKVL84F-300U 300 10 ±10 210 10 84×84×30
PKVL60-100U 100 2 ±2 380 5 74×60×22
PKVL60-200U 200 5 ±5 350 5 74×60×22
PKMVL160-200U 200 5 ±5 150 10 160×240×24
PK3H / PK3L
XYZ-axes stage with an opening

PK3H

Model Number Travel range
[μm]
Resolution
[nm]
Repeatability
[nm]
Resonant frequency
[Hz]
Load capacity
[N]
Size
[mm]
PK3H130-030UA (X,Y)30,(Z)20 (X,Y,Z)1 (X,Y,Z)±1 820 10 130×130×30
PK3H150-050UA (X,Y)50,(Z)30 (X,Y)2,(Z)1 (X,Y)±2,(Z)±1 670 10 150×150×30

PK3L

Model Number Travel range
[μm]
Resolution
[nm]
Repeatability
[nm]
Resonant frequency
[Hz]
Load capacity
[N]
Size
[mm]
PK3L150-100UA (X,Y)100,(Z)30 (X,Y)2,(Z)1 (X,Y)±2,(Z)±1 430 10 150×150×30
PK3L150-100U (X,Y,Z)100 (X,Y,Z)2 (X,Y,Z)±2 350 10 150×150×30
PK3L150-200UA (X,Y)200,(Z)100 (X,Y)5,(Z)2 (X,Y)±5,(Z)±2 280 10 150×150×30
PK3L150-300UA (X,Y)300,(Z)100 (X,Y)10,(Z)2 (X,Y)±10,(Z)±2 210 10 150×150×30

From inspection and measurement to manufacturing equipment

We are ready to respond to requests for precision positioning of nanometers to submicrons required for various applications.

Inquiry