A general-purpose type with a strain gauge
Piezo Stage
A general-purpose type with a strain gauge
This is a general-purpose piezo stage developed at a low cost by adopting a strain gauge type sensor as the built-in displacement sensor. Capable of performing highly reliable positioning with a 20nm displacement resolution and feedback control, this stage has an excellent high-speed response.
Lineup
PS1L
X-axis stage
| Model Number | Travel range [μm] |
Resolution [nm] |
Repeatability [nm] |
Resonant frequency [Hz] |
Load capacity [N] |
Size [mm] |
|---|---|---|---|---|---|---|
| PS1L60-200U-S | 200 | 20 | ±20 | 470 | 5 | 60×60×26 |
| PS1L60-400U-S | 400 | 50 | ±50 | 290 | 5 | 60×60×26 |
PS2L
XY-axes stage
| Model Number | Travel range [μm] |
Resolution [nm] |
Repeatability [nm] |
Resonant frequency [Hz] |
Load capacity [N] |
Size [mm] |
|---|---|---|---|---|---|---|
| PS2L80-200U-S | （X,Y）200 | （X,Y）20 | （X,Y）±20 | 170 | 5 | 80×80×25 |
| PS2L90-400U-S | （X,Y）400 | （X,Y）50 | （X,Y）±50 | 155 | 5 | 90×90×25 |
PSVL
Z-axis stage
| Model Number | Travel range [μm] |
Resolution [nm] |
Repeatability [nm] |
Resonant frequency [Hz] |
Load capacity [N] |
Size [mm] |
|---|---|---|---|---|---|---|
| PSVL60-200U-S | 200 | 20 | ±20 | 390 | 5 | 60×60×30 |
| PSVL60-400U-S | 400 | 50 | ±50 | 270 | 5 | 60×60×30 |
Objective lens focusing
| Model Number | Travel range [μm] |
Resolution [nm] |
Repeatability [nm] |
Resonant frequency [Hz] |
Size [mm] |
|---|---|---|---|---|---|
| PFHW**-200U-S | 200 | 20 | ±20 | 380 | 60×74×24 |
| PFHW**-400U-S | 400 | 50 | ±50 | 250 | 60×74×24 |
| PFHC2020-800U-S | 800 | 100 | ±100 | 120 | 40×114×36 |
Controller for the strain gauge type sensor
| Model No | Number of axes for connection | Feedback control method | Input interface | Power supply | Outside dimension [mm] |
|
|---|---|---|---|---|---|---|
| Standard interface | Additional option | |||||
| NCS6101S | 1Axis | PI analog | Analog voltage 0～10V | Serial（RS232C）or parallel（16bit） | AC100～120V / AC200～240V Switchable way | W87.5×D365×H135.8 |
| NCM6201S | 2Axis | PI analog | Analog voltage 0～10V | Serial（RS232C） | AC100～120V / AC200～240V Switchable way | W236×D388×H140 |
| NCM6301S | 3Axis | PI analog | Analog voltage 0～10V | Serial（RS232C） | AC100～120V / AC200～240V Switchable way | W236×D388×H140 |
Product Inquiry
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Piezo Stage
- Standard linear stages
- Stages with an opening
- Rotary/tilting stages
- For optical mirror alignment
- For objective lens focusing
- A stage for ultraprecision processing machinery
- A general-purpose type with a strain gauge
- Simple actuator
- Impact actuator
- Moisture-resistant / for special environments
- Controllers
- Piezo drivers
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Precision Motor Stage
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Force Sensor
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Examples of product application
- Laser/optics-related equipment,optical djustment
- Precision scanning / mapping measurement
- Uses for objective lens focusing
- Ultraprecision nano-machining / high-speed cutting
- Uses where various forms of precision positioning are required
- Micro force detection / measurement at μN (mg) level
- High-sensitivity force measurement while maintaining high rigidity
From inspection and measurement to manufacturing equipment
We are ready to respond to requests for precision positioning of nanometers to submicrons required for various applications.
Inquiry