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Piezo Stage

Standard linear stages

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Piezo Stage

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Standard linear stages

Standard linear stages

Standard linear stages constitute a basic series among the piezo stage lineup, which ranges from single-axis types to integrated three-axes types with various strokes.

Classification of performances with two mechanisms

The mechanisms are classified into a "direct-drive mechanism," which has a high resonant frequency and is focused on high-speed response, and a "displacement magnification mechanism," which secures a stroke.

Direct-drive mechanism

  • A mechanism in which a piezo-electric elements directly moves the table.
  • It excels in resolution and response thanks to a short stroke.
  • With high rigidity, it is capable of performing stable positioning even under a large load.

Displacement magnification mechanism

  • The product has a mechanism for mechanically amplifying the elongation of the piezo-electric element.
  • A stroke several times to more than ten times longer than the direct-drive type can be obtained according to the magnification ratio.
  • Feedback control with the built-in displacement sensor also enables the positioning reproducibility to be maintained.

Applications

  • Semiconductor and FPD inspection
  • HDD Tester
  • Laser optic alignment
  • Interferometer devices
  • Analytical Instruments
  • Nanometer positioning

Lineup

PS1H / PS1L
Standard linear X-axis stage

PS1H　Direct-drive mechanism

Model Number Travel range
[μm]		 Resolution
[nm]		 Repeatability
[nm]		 Resonant frequency
[Hz]		 Load capacity
[N]		 Size
[mm]
PS1H25-006U 6 1 ±1 130005 25×30×16
PS1H35-006U 6 1 ±1 970010 35×35×16
PS1H45-012U 12 1 ±1 620010 45×45×16
PS1H60F-012U 12 1 ±1 410050 60×60×20
PS1H40F-020U 20 1 ±1 410030 48×60×13.5
PS1H60-020U 20 1 ±1 330010 60×60×16
PS1H80-030U 30 1 ±1 190010 80×80×16
PS1H80F-030U 30 1 ±1 190050 80×80×20

PS1L　Displacement magnification mechanism

Model Number Travel range
[μm]		 Resolution
[nm]		 Repeatability
[nm]		 Resonant frequency
[Hz]		 Load capacity
[N]		 Size
[mm]
PS1L45-030U 30 1 ±1 150010 45×50×20
PS1L40-050U 50 2 ±2 9705 40×45×15
PS1L60-060U 60 2 ±2 130010 60×70×20
PS1L40-100U 100 2 ±2 5105 40×45×15
PS1L65-250U 250 10 ±10 3605 65×65×15
PS1L66-500U 500 20 ±20 2005 66×66×17
PS1L80-700U 700 30 ±30 1065 80×80×20
PS2H / PS2L
Standard linear XY-axes stage

PS2H　Direct-drive mechanism

Model Number Travel range
[μm]		 Resolution
[nm]		 Repeatability
[nm]		 Resonant frequency
[Hz]		 Load capacity
[N]		 Size
[mm]
PS2H60-012U （X,Y）12（X,Y）1 （X,Y）±1 200010 60×80×25
PS2H95-012U （X,Y）12 （X,Y）1 （X,Y）±1 380010
 95×95×25
PS2H60-030U （X,Y）30 （X,Y）1 （X,Y）±1 160010
 60×80×25
PS2H110-030U （X,Y）30 （X,Y）1 （X,Y）±1 340010
 110×110×25

PS2L　Displacement magnification mechanism

Model Number Travel range
[μm]		 Resolution
[nm]		 Repeatability
[nm]		 Resonant frequency
[Hz]		 Load capacity
[N]		 Size
[mm]
PS2L50-050U （X,Y）50 （X,Y）2
 （X,Y）±2 4205 50×50×25
PS2L92-050U （X,Y）50 （X,Y）2
 （X,Y）±2 130010 92×92×25
PS2L100-080U （X,Y）80 （X,Y）2
 （X,Y）±2 48010 100×100×30
PS2L50-100U （X,Y）100 （X,Y）2
 （X,Y）±2 2805 50×50×25
PS2L60-250U （X,Y）250 （X,Y）10
 （X,Y）±10 1205 60×60×26
PSVH / PSVL
Standard linear Z-axis stage

PSVH　Direct-drive mechanism

Model Number Travel range
[μm]		 Resolution
[nm]		 Repeatability
[nm]		 Resonant frequency
[Hz]		 Load capacity
[N]		 Size
[mm]
PSVH35-006U 6 1 ±1 350010 35×35×26
PSVH45-012U 12 1 ±1 260010 45×45×36
PSVH60F-012U 12 1 ±1 160050 60×60×40
PSVH80F-030U 30 1 ±1 120050 80×80×60

PSVL　Displacement magnification mechanism

Model Number Travel range
[μm]		 Resolution
[nm]		 Repeatability
[nm]		 Resonant frequency
[Hz]		 Load capacity
[N]		 Size
[mm]
PSVL45-060U 602 ±2 5705 45×45×32
PSVL45F-100U 100 2 ±2 30010 45×45×32
PSVL60-100U 100 2 ±2 3805 60×60×32
PSVL60F-100U 100 2 ±2 27010 60×60×38
PSVL60F-150U 150 5 ±5 19010 60×60×32
PSVL80F-300U 300 10 ±10 18010 80×80×38
PS3H / PS3L
Standard linear XYZ-axes stage

PS3H　Direct-drive mechanism

Model Number Travel range
[μm]		 Resolution
[nm]		 Repeatability
[nm]		 Resonant frequency
[Hz]		 Load capacity
[N]		 Size
[mm]
PS3H70-020UA （X,Y）20,（Z）12 （X,Y,Z）1 （X,Y,Z）±1 970 10 80×70×65
PS3H120-030U （X,Y,Z）30
 （X,Y,Z）1 （X,Y,Z）±1 740 10 120×120×30

PS3L　Displacement magnification mechanism

Model Number Travel range
[μm]		 Resolution
[nm]		 Repeatability
[nm]		 Resonant frequency
[Hz]		 Load capacity
[N]		 Size
[mm]
PS3L100-080UA （X,Y）80,（Z）20 （X,Y）2,（Z）1
 （X,Y）±2,（Z）±1 400 10 100×100×30
PS3L68-100U （X,Y,Z）100 （X,Y,Z）2 （X,Y,Z）±2 250 5 68×68×40
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We are ready to respond to requests for precision positioning of nanometers to submicrons required for various applications.

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