Japanese piezoelectric equipment manufacturer
Piezo Stage

For optical mirror alignment

Piezo Stage

Logo NanoControl
For optical mirror alignment

This stage is designed for fine adjustment of the angle of optical mirrors. It excels in high-speed oscillation and high positioning reproducibility, and is optimal for applications such as laser beam scanning and precision mirror alignment.

A stage for a large-diameter mirror is also available on a custom order basis

Since the piezo element as the drive source has a large generative force (at hundreds of N), the stage is capable of stably performing positioning with high accuracy even for a heavy, large-diameter mirror.

Angle control is also easy

Even a static motion for moving the mirror by specifying the angle in a value, and an oscillating motion for reciprocally oscillating the mirror on a continuous basis, can be easily performed through a controller/driver.

  • Optical axis adjustment
  • Cavity adjustment
  • Scanning laser beam
  • Laser processing
  • Tilt adjustment
  • Biophotonics
Single-axis tilting(θx)

Model Number Deflection angle Resolution Resonant frequency
[Hz]
Load capacity
[N]
Size
[mm]
PT1M36-500S 500"[Sec]≒0.14°≒2.4mrad 0.05"[Sec]≒0.24μrad 8000 0.3 36×42×29
Double-axes tilting(θxθy)

Model Number Deflection angle Resolution Resonant frequency
[Hz]
Load capacity
[N]
Size
[mm]
PT2M60-240S (θx/θy)240"[Sec]≒0.07°≒1.2mrad (θx/θy)0.05"[Sec]≒0.24μrad 760 0.5 60×60×53
PT2M120-500S (θx/θy)500"[Sec]≒0.14°≒2.4mrad (θx/θy)0.05"[Sec]≒0.24μrad 180 5 120×120×43
PT2M40-800S (θx/θy)800"[Sec]≒0.22°≒3.9mrad (θx/θy)0.05"[Sec]≒0.24μrad 330 1 60×40×45

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From inspection and measurement to manufacturing equipment

We are ready to respond to requests for precision positioning of nanometers to submicrons required for various applications.

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