Japanese piezoelectric equipment manufacturer
Piezo Stage

For objective lens focusing

Piezo Stage

Logo NanoControl
For objective lens focusing

These are piezo stages exclusively designed for adjusting the focus of objective lenses. Being incorporated in a microscope, inspection/measurement devices or observation equipment, they can speed-up lens focusing and improve the accuracy.

Objective lenses of various manufacturers can be fitted.

  • Four thread sizes are selectable from in order to accommodate different manufacturers'lens thread diameters.
  • An optional thread diameter conversion adapter is also available.
  • Fitting of a non-standard lens is also negotiable.

Four types are selectable

【Horizontal type】
  • This type has a structure with a thin body.
  • Since it offers various strokes, it is recommended to select this type if a stage for a long travel distance is required.
【Vertical type】
  • This type has high rigidity and is focused on response.
  • It is suitable for cases where a heavy lens or a lens with a long tube is used, or cases where a high-speed focusing is desired.
【Box type】
  • This type has a double-supported structure that is symmetrical around the objective lens, and is capable of providing stable focusing even with a heavy lens.
  • This product can be securely installed and fixed with four screws, and 1s suitable for incorporation in a manufacturing system or an inspection device.
【For microscope tube】
  • With a microscope tube attached, it can be finely adjusted toward the focusing direction.
  • High-speed focusing
  • Image processors
  • Confocal microscopes
  • Laser processing
  • Semiconductor and FPD inspection devices
  • Interferometer shape measurement
PFH
Horizontal type

Model Number Travel range
[μm]
Resolution
[nm]
Repeatability
[nm]
Resonant frequency
[Hz]
PFHC***-015U 15 1 ±1 950
PFHW***-015U 15 1 ±1 680
PFHC***-100U 100 2 ±2 520
PFHW***-100U 100 2 ±2 430
PFHW***-200U 200 5 ±5 370
PFHW***-300U 300 10 ±10 300
PFHW***-400U 400 20 ±20 240
PFV
Vertical type

Model Number Travel range
[μm]
Resolution
[nm]
Repeatability
[nm]
Resonant frequency
[Hz]
PFVC***-100U 100 2 ±2 1000
PFVW***-100U 100 2 ±2 750
PFVW***-200U 200 5 ±5 490
PFB
Box type

Model Number Travel range
[μm]
Resolution
[nm]
Repeatability
[nm]
Resonant frequency
[Hz]
PFB*-030U 30 1 ±1 3100
PFB*-100U 100 2 ±2 490
PFB*-300U 300 10 ±10 210
PFR
For microscope tube

Model Number Travel range
[μm]
Resolution
[nm]
Repeatability
[nm]
Resonant frequency
[Hz]
PFR150-080U 80 2 ±2 590

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From inspection and measurement to manufacturing equipment

We are ready to respond to requests for precision positioning of nanometers to submicrons required for various applications.

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