Japanese piezoelectric equipment manufacturer
Piezo Stage

A stage for ultraprecision processing machinery

Piezo Stage

Logo NanoControl
A stage for ultraprecision processing machinery

This stage is intended to achieve nano-micro processing in precision cutting. It is capable of performing position control for tool cutting and the work (workpiece to be processed) at high speed and with high accuracy.

A dust-proof and drip-proof measure

A sealed structure is adopted as a measure to protect the stage from a machining fluid or mist, and prevent tiny chips from entering the stage.

A robust body

The body is made of steel in order to secure stability during machining.
The body structure is so robust that the machining accuracy is not impaired by factors such as chatter vibration or cutting load.

  • Diamond bit feeding
  • Fine cutting and grinding
  • High-speed tool control, FTS
  • Work positioning
  • Precision metal processing
  • Precision positioning of high load object
PU1
Single-axis type

Model Number Travel range
[μm]
Resolution
[nm]
Repeatability
[nm]
Resonant frequency
[Hz]
Load capacity
[N]
PU1H70F-012U 12 1 ±1 4300 50
PU1H80F-030U 30 1 ±1 2200 50
PU1H150F-060U 60 2 ±2 650 50
PU1L70F-080U 80 2 ±2 1000 50
PU2
Double-axes type

Model Number Travel range
[μm]
Resolution
[nm]
Repeatability
[nm]
Resonant frequency
[Hz]
Load capacity
[N]
PU2H70F-030U (X,Y)30 (X,Y)1 (X,Y)±1 1800 50
PU2H90F-030U (X,Y)30 (X,Y)1 (X,Y)±1 890 30

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From inspection and measurement to manufacturing equipment

We are ready to respond to requests for precision positioning of nanometers to submicrons required for various applications.

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