Japanese piezoelectric equipment manufacturer
Piezo Stage

A general-purpose type with a strain gauge

Piezo Stage

Logo NanoControl
A general-purpose type with a strain gauge

This is a general-purpose piezo stage developed at a low cost by adopting a strain gauge type sensor as the built-in displacement sensor. Capable of performing highly reliable positioning with a 20nm displacement resolution and feedback control, this stage has an excellent high-speed response.

PS1L
X-axis stage

Model Number Travel range
[μm]
Resolution
[nm]
Repeatability
[nm]
Resonant frequency
[Hz]
Load capacity
[N]
Size
[mm]
PS1L60-200U-S 200 20 ±20 470 5 60×60×26
PS1L60-400U-S 400 50 ±50 290 5 60×60×26
PS2L
XY-axes stage

Model Number Travel range
[μm]
Resolution
[nm]
Repeatability
[nm]
Resonant frequency
[Hz]
Load capacity
[N]
Size
[mm]
PS2L80-200U-S (X,Y)200 (X,Y)20 (X,Y)±20 170 5 80×80×25
PS2L90-400U-S (X,Y)400 (X,Y)50 (X,Y)±50 155 5 90×90×25
PSVL
Z-axis stage

Model Number Travel range
[μm]
Resolution
[nm]
Repeatability
[nm]
Resonant frequency
[Hz]
Load capacity
[N]
Size
[mm]
PSVL60-200U-S 200 20 ±20 390 5 60×60×30
PSVL60-400U-S 400 50 ±50 270 5 60×60×30
Objective lens focusing

Model Number Travel range
[μm]
Resolution
[nm]
Repeatability
[nm]
Resonant frequency
[Hz]
Size
[mm]
PFHW**-200U-S 200 20 ±20 380 60×74×24
PFHW**-400U-S 400 50 ±50 250 60×74×24
PFHC2020-800U-S 800 100 ±100 120 40×114×36
Controller for the strain gauge type sensor
Model No Number of axes for connection Feedback control method Input interface Power supply Outside dimension
[mm]
Standard interface Additional option
NCS6101S 1Axis PI analog Analog voltage 0~10V Serial(RS232C)or parallel(16bit) AC100~120V / AC200~240V Switchable way W87.5×D365×H135.8
NCM6201S 2Axis PI analog Analog voltage 0~10V Serial(RS232C) AC100~120V / AC200~240V Switchable way W236×D388×H140
NCM6301S 3Axis PI analog Analog voltage 0~10V Serial(RS232C) AC100~120V / AC200~240V Switchable way W236×D388×H140

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From inspection and measurement to manufacturing equipment

We are ready to respond to requests for precision positioning of nanometers to submicrons required for various applications.

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