Japanese piezoelectric equipment manufacturer
Piezo Stage

Moisture-resistant / for special environments

Piezo Stage

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Moisture-resistant / for special environments

These are piezo stages intended to cope with special environments by having high durability under high-temperature and high-humidity environments by adopting a “metal-sealed piezoelectric actuator.”

The type enclosed in a metal case is designed to be less susceptible to the atmosphere by having a structure in which the piezoelectric element is isolated from the external air. It is more durable to the ambient temperature and humidity than the piezoelectric element incorporated in the type with a resin exterior. In addition, this type is less subject to deterioration (life shortening) even if it is applied with a constant voltage for a long time, and is therefore suitable for the following equipment, environments or usages.

  • Equipment or microscope that handles liquids such as bio
  • Environment with oil or mist due to processing machinery
  • Cases where the stage is used in static (stand-by) state for a long time in a certain position
    * The operating time is shorter.
  • Use in a place where it is difficult to replace (remove) the stage in the case of failure
  • Applications where high reliability is required
  • High / ultrahigh vacuum
X-axis stage
Model Number Travel range
[μm]
Resolution
[nm]
Repeatability
[nm]
Resonant frequency
[Hz]
Load capacity
[N]
Size
[mm]
PSM1H70-040U 40 1 ±1 2700 10 70×85×25
PSM1H70F-040U 40 1 ±1 1780 30 70×85×25
PSM1L70-100U 100 2 ±2 930 10 70×85×25
XY-axes stage
Model Number Travel range
[μm]
Resolution
[nm]
Repeatability
[nm]
Resonant frequency
[Hz]
Load capacity
[N]
Size
[mm]
PKM2L130-040U (X,Y)40 (X,Y)1 (X,Y)±1 1440 10 130×130×30
PKM2L160-200U (X,Y)200 (X,Y)5 (X,Y)±5 330 10 160×160×30

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From inspection and measurement to manufacturing equipment

We are ready to respond to requests for precision positioning of nanometers to submicrons required for various applications.

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