Japanese piezoelectric equipment manufacturer
Precision Motor Stage

Ultrasonic motor stage

Precision Motor Stage

Logo NanoControl
Ultrasonic motor stage

This product is a high-accuracy stage capable of performing position control with high resolution of 20 nm or 40 nm in a moving range of tens of mm. Adopting ultrasonic actuator SPPA (Super Precision Piezo Actuator), this stage has high static stability with low heat generation and with friction retention.

Features

  • An actuator capable of both rough feeding and fine feeding
  • Generates less heat itself
  • High static stability achieved with friction retention
  • High positional repeatability with a built-in liner encoder
  • High-accuracy positioning of an optical system
  • Laser alignment
  • Precision mapping measurement
  • X-ray/analysis and measuring equipment
  • Specimen stage for microscopes
  • Application in which the object is to be held static after position adjustment

The product is very effective in applications where fixed-point positioning is mainly required or applications where the object is held static as the product is turned off after positioning.

TS1L80 / TS1L120
X-axis stage

Model number TS1L80-015A TS1L80-015B TS1L120-035A TS1L120-035B
Moving range ±7.5mm ±17.5mm
Resolution 20nm 40nm 20nm 40nm
Maximum travel speed 10mm/sec 10mm/sec
Withstand load 2kg 3kg
Built-in optical linear scale Type Manufactured by RENISHAW Manufactured by THK PRECISION Manufactured by RENISHAW Manufactured by THK PRECISION
Size 80×100×28 80×118×28 120×140×28 120×158×28

TS2L180
XY-axes stage with an opening

Model number TS2L180-015A TS2L180-015B
Moving range (X)±7.5mm, (Y)±7.5mm
Resolution 20nm 40nm
Maximum travel speed 10mm/sec
Withstand load 3kg
Built-in optical linear scale Type Manufactured by RENISHAW Manufactured by THK PRECISION
Size 180×205×48 180×220×48

TS1R150
Rotary stage

Model number TS1R150-360A
Moving range 360°
Resolution 1"
Maximum travel speed 5°/sec
Withstand load 3kg
Built encoder Rotary encoder
Size 150×170×46

Controller for Ultrasonic motor stage

  • This product is a controller that is dedicated for the ultrasonic motor stage, and contains a driver and a linear scale input circuit.
  • It is capable of controlling three axes at a maximum.
  • Equipped with an RS232C as the control interface, the controller can be operated as soon as it is connected with the computer.
Model number TC1311A TC1322A TC1333A TC1312A
Number of controlled axes 1 2 3 1
Stage to be connected Linear 1 axis Linear 2 axis Linear 3 axis Rotary 1 axis
Input sensor type Linear scale/Rotary encoder reading
Control interface RS232C
Control system PID feedback control (for fine feeding)
Driver output voltage -12V ~ +12V
Power source AC100 ~ 120V / AC200 ~ 240V Switchable


Sample software

We provide sample software for RS232C connection for free.
If the sample software is used, the controller can perform basic motions such as return to origin, travel to a designated position and current value display immediately after it is connected with the computer.

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From inspection and measurement to manufacturing equipment

We are ready to respond to requests for precision positioning of nanometers to submicrons required for various applications.

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