XYZAxis With an opening model｜THK PRECISION CO.,LTD.

XYZAxis With an opening model

Each stage in this lineup has an opening (penetration hole) in the center of the moving table. These stages are suitable for applications such as laser transmission, micro observation, in which the stage is used in combination with a microscope or an analyzer, and high-accuracy mapping measurement.

Available from a compact to large openings

The stages are available in various openings, from a compact-opening type, which is suitable for small devices, to a large-opening type, in which a large panel substrate can be aligned.

Smooth and accurate scanning

Each stage is capable of performing a highly-reliable operation according to a command signal thanks to high-accuracy feedback control.

Applications

SPM,AFM
Microscope tables
Spectroscopic instruments
Semiconductor & FPD-related inspections
Photolithography systems, Exposure devices
Mapping measurements

PK3H/PK3L XYZAxis With an opening model

PK3H

SCROLL

Model Number	PK3H130-030UA	PK3H150-050UA
Appearance
Travel range ( Closed loop )	（X,Y）30μm,（Z）20μm	（X,Y）50μm,（Z）30μm
Resolution	（X,Y,Z）1nm	（X,Y）2nm,（Z）1nm
Repeatability	（X,Y,Z）±1nm	（X,Y）±2nm,（Z）±1nm
Load capacity	10N
Resonant frequency ( 0g Load )	820Hz	670Hz
Built-in displacement sensor	Capacitive displacement sensor
Body Material	Aluminum＋Steel

PK3L

SCROLL

Model Number	PK3L150-100UA	PK3L150-100U	PK3L150-200UA	PK3L150-300UA
Appearance
Travel range ( Closed loop )	（X,Y）100μm,（Z）30μm	（X,Y,Z）100μm	（X,Y）200μm,（Z）100μm	（X,Y）300μm,（Z）100μm
Resolution	（X,Y）2nm,（Z）1nm	（X,Y,Z）2nm	（X,Y）5nm,（Z）2nm	（X,Y）10nm,（Z）2nm
Repeatability	（X,Y）±2nm,（Z）±1nm	（X,Y,Z）±2nm	（X,Y）±5nm,（Z）±2nm	（X,Y）±10nm,（Z）±2nm
Load capacity	10N
Resonant frequency ( 0g Load )	430Hz	350Hz	280Hz	210Hz
Built-in displacement sensor	Capacitive displacement sensor
Body Material	Aluminum＋Steel	Aluminum