ZAxis High durability model
Standard linear stages constitute a basic series among the piezo stage lineup, which ranges from single-axis types to integrated three-axes types with various strokes.
Classification of performances with two mechanisms
The mechanisms are classified into a "direct-drive mechanism," which has a high resonant frequency and is focused on high-speed response, and a "displacement magnification mechanism," which secures a stroke.
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Direct-drive mechanism
- A mechanism in which a piezo-electric elements directly moves the table.
- It excels in resolution and response thanks to a short stroke.
- With high rigidity, it is capable of performing stable positioning even under a large load.
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Displacement magnification mechanism
- The product has a mechanism for mechanically amplifying the elongation of the piezo-electric element.
- A stroke several times to more than ten times longer than the direct-drive type can be obtained according to the magnification ratio.
- Feedback control with the built-in displacement sensor also enables the positioning reproducibility to be maintained.
Applications
- Semiconductor and FPD inspection
- HDD Tester
- Laser optic alignment
- Interferometer devices
- Analytical Instruments
- Nanometer positioning
Direct-drive mechanism
| Model Number | PSMVH60-020U | PSMVH60F-020U |
|---|---|---|
| Appearance |  |
 |
| Travel range ( Closed loop ) | 20μm | |
| Resolution | 1nm | |
| Repeatability | ±1nm | |
| Load capacity | 50N | |
| Resonant frequency ( 0g Load ) | 1730Hz | 1620Hz |
| Built-in displacement sensor | Capacitive displacement sensor | |
| Body Material | Aluminum | Steel |
Displacement magnification mechanism
| Model Number | PSMVL60-060U | PSMVL60F-060U | PSMVL60-100U | PSMVL60F-100U |
|---|---|---|---|---|
| Appearance |  |
 |
 |
 |
| Travel range ( Closed loop )） | 60μm | 100μm | ||
| Resolution | 2nm | 2nm | ||
| Repeatability | ±2nm | ±2nm | ||
| Load capacity | 10N | 10N | ||
| Resonant frequency ( 0g Load ) | 420Hz | 380Hz | 310Hz | 270Hz |
| Built-in displacement sensor | Capacitive displacement sensor | Capacitive displacement sensor | ||
| Body Material | Aluminum | Steel | Aluminum | Steel |
Direct-drive mechanism
Displacement magnification mechanism RoHS
PSMVH Direct-drive mechanism
PSMVL Displacement magnification mechanism RoHS
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