XYAxis A general-purpose model with a strain gauge
This is a general-purpose piezo stage developed at a low cost by adopting a strain gauge type sensor as the built-in displacement sensor. Capable of performing highly reliable positioning with a 20nm displacement resolution and feedback control, this stage has an excellent high-speed response.
PS2L XY-axes stage
| Model Number | PS2L80-200U-S | PS2L90-400U-S |
|---|---|---|
| Appearance |  |
 |
| Travel range (Closed loop) | （X,Y）200μm | （X,Y）400μm |
| Resolution | （X,Y）20nm | （X,Y）50nm |
| Repeatability | （X,Y）±20nm | （X,Y）±50nm |
| Load capacity | 5N | 5N |
| Resonant frequency（0g Load） | 170Hz | 155Hz |
| Built-in displacement sensor | Strain gauge sensor | |
| Body Material | Aluminum + Steel | |
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