Vertical type
These are piezo stages exclusively designed for adjusting the focus of objective lenses. Being incorporated in a microscope, inspection/measurement devices or observation equipment, they can speed-up lens focusing and improve the accuracy.
Objective lenses of various manufacturers can be fitted.
- Four thread sizes are selectable from in order to accommodate different manufacturers'lens thread diameters.
- An optional thread diameter conversion adapter is also available.
- Fitting of a non-standard lens is also negotiable.
Four types are selectable
-
【Horizontal type】
- This type has a structure with a thin body.
- Since it offers various strokes, it is recommended to select this type if a stage for a long travel distance is required.
-
【Vertical type】
- This type has high rigidity and is focused on response.
- It is suitable for cases where a heavy lens or a lens with a long tube is used, or cases where a high-speed focusing is desired.
-
【Box type】
- This type has a double-supported structure that is symmetrical around the objective lens, and is capable of providing stable focusing even with a heavy lens.
- This product can be securely installed and fixed with four screws, and 1s suitable for incorporation in a manufacturing system or an inspection device.
-
【For microscope tube】
- With a microscope tube attached, it can be finely adjusted toward the focusing direction.
Applications
- High-speed focusing
- Image processors
- Confocal microscopes
- Laser processing
- Semiconductor and FPD inspection devices
- Interferometer shape measurement
PFV Vertical type
PFV
| Model Number | PFVC＊＊-100U | PFVW＊＊-100U | PFVW＊＊-200U |
|---|---|---|---|
| Appearance |  |
||
| Nominal diameter | Small dia. | Large dia. | Large dia. |
| Travel range ( Closed loop ) | 100μm | 200μm | |
| Resolution | 2nm | 5nm | |
| Repeatability | ±2nm | ±5nm | |
| Resonant frequency ( 0g Load ) | 1000Hz | 750Hz | 490Hz |
| Built-in displacement sensor | Capacitive displacement sensor | ||
| Body Material | Aluminum | ||
Metal case enclosed piezo-electric element used (custom-made)
| Model Number | custom design examples |
|---|---|
| Appearance |  |
| Nominal diameter | Large dia. |
| Travel range ( Closed loop ) | 100μm |
| Resolution | 2nm |
| Repeatability | ±2nm |
| Resonant frequency ( 0g Load ) | - |
| Built-in displacement sensor | Capacitive displacement sensor |
| Body Material | Aluminum |
PFV
Metal case enclosed piezo-electric element used (custom-made)
PFV
Metal case enclosed piezo-electric element used (custom-made)
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