XYAxis Standard model
Standard linear stages constitute a basic series among the piezo stage lineup, which ranges from single-axis types to integrated three-axes types with various strokes.
Classification of performances with two mechanisms
The mechanisms are classified into a "direct-drive mechanism," which has a high resonant frequency and is focused on high-speed response, and a "displacement magnification mechanism," which secures a stroke.
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Direct-drive mechanism
- A mechanism in which a piezo-electric elements directly moves the table.
- It excels in resolution and response thanks to a short stroke.
- With high rigidity, it is capable of performing stable positioning even under a large load.
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Displacement magnification mechanism
- The product has a mechanism for mechanically amplifying the elongation of the piezo-electric element.
- A stroke several times to more than ten times longer than the direct-drive type can be obtained according to the magnification ratio.
- Feedback control with the built-in displacement sensor also enables the positioning reproducibility to be maintained.
Applications
- Semiconductor and FPD inspection
- HDD Tester
- Laser optic alignment
- Interferometer devices
- Analytical Instruments
- Nanometer positioning
PS2H / PS2L Standard linear XY-axes stage
PS2H Direct-drive mechanism
| Model Number | PS2H60-012U | PS2H95-012U | PS2H60-030U | PS2H110-030U |
|---|---|---|---|---|
| Appearance |  |
 |
 |
 |
| Travel range ( Closed loop ) | （X, Y）12 μm | （X, Y）30 μm | ||
| Resolution | （X, Y）1 nm | |||
| Repeatability | （X, Y）±1 nm | |||
| Load capacity | 10N | |||
| Resonant frequency(0g Load) | 2000 Hz | 3800 Hz | 1600 Hz | 3400 Hz |
| Built-in displacement sensor | Capacitive displacement sensor | |||
| Body Material | Aluminum | Aluminum | Aluminum | Aluminum |
PS2L Displacement magnification mechanism
| Model Number | PS2L50-050U | PS2L92-050U | PS2L100-080U | PS2L50-100U | PS2L60-250U |
|---|---|---|---|---|---|
| Appearance |  |
 |
 |
 |
 |
| Travel range ( Closed loop ) | （X,Y）50μm | （X,Y）80μm | （X,Y）100μm | （X,Y）250μm | |
| Resolution | （X,Y）2nm | （X,Y）10nm | |||
| Repeatability | （X,Y）±2nm | （X,Y）±10nm | |||
| Load capacity | 5N | 10N | 10N | 5N | 5N |
| Resonant frequency(0g Load) | 420Hz | 1300Hz | 480Hz | 280Hz | 120Hz |
| Built-in displacement sensor | Capacitive displacement sensor | ||||
| Body Material | Aluminum + Steel | Aluminum | Aluminum | Aluminum + Steel | Aluminum |
PS2H Direct-drive mechanism
PS2L Displacement magnification mechanism
PS2H Direct-drive mechanism
PS2L Displacement magnification mechanism
Comparison list of mechanism, stroke, resolution, and resonant frequency
It is recommended that the stroke be kept to the minimum required for high responsiveness and high resolution.
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